TEL Tokyo Electron ICPL Interface Block Chill Plate Process Station Lithius Used

TEL Tokyo Electron ICPL Interface Block Chill Plate Process Station Lithius Used Part No: ICPL Model No: Interface Block Chill Plate Process Station ICP-R Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5085-408538-14 BASE(ICP-R)ASSY 5010-101202-11: FRAME(ICPL-R) (Qty. 1) 5010-306891-11: PAN(R),DRAIN (Qty. 1) 5010-306892-11: COVER(R),UNDER (Qty. 1) 5010-405405-11: BRACKET (Qty. 1) 5010-406114-11: BRACKET (Qty. 2) 5010-405406-11: PIN (Qty. 1) 5010-304675-11: BRACKET (Qty. 1) 5010-306502-11: COVER (Qty. 1) 5010-306503-11: BAR (Qty. 2) 5010-407105-11: PLATE (Qty. 4) 5010-406079-11: BLOCK (Qty. 4) 5010-407106-11: BRACKET1(R) (Qty. 1) 5010-407107-11: BRACKET2(R) (Qty. 1) 5010-407108-11: BRACKET3(R) (Qty. 1) 5010-309038-11: BRACKET4(R) (Qty. 1) 5010-405780-11: PLATE (Qty. 1) 5010-405781-11: PLATE (Qty. 1) 5010-405782-11: PACKING (Qty. 1) 5010-306947-11: COVER (Qty. 1) 5010-407435-11: SEAL (Qty. 1) 5010-405801-11: COVER (Qty. 1) 5010-407306-11: BRACKET (Qty. 1) 020-000349-1: SET SCREW M6*10 SUS304 (Qty. 2) 028-007016-1: FITTING,TUBE KJL04-01S (Qty. 3) 021-001086-1: PARALLEL PIN MSC4-10 (Qty. 4) 5012-000061-11: VALVE,SOL SY3140T-5MOZE-M5-X216 (Qty. 1) 028-002269-1: FITTING,TUBE F900-L-9.52 (Qty. 4) 028-006034-1: FITTING,TUBE MS-5H-4 (Qty. 2) 020-000028-1: CAP SCREW M4*6 SUS304 (Qty. 16) 020-000032-1: CAP SCREW M4*10 SUS304 (Qty. 8) 033-000007-1: NUT M4 SUS304 (Qty. 5) 020-000518-1: CAP SCREW M3*4 SUS304 (Qty. 14) 020-000005-1: CAP SCREW M3*6 SUS304 (Qty. 4) 020-000009-1: CAP SCREW M3*10 SUS304 (Qty. 8) 020-001089-1: CAP SCREW M3*14 SUS304 (Qty. 24) 020-000020-1: CAP SCREW M3*20 SUS304 (Qty. 2) 026-102041-1: SET PLATE TM-147-1-5563 WASHER (Qty. 2) 020-001070-1: SET SCREW M3*10 SUS304 (Qty. 4) 020-002601-1: BAIND SCREW M3*4 SUS304 (Qty. 4) 033-000003-1: NUT M3 SUS304 (Qty. 12) 020-000352-1: SET SCREW M4*10 SUS304 (Qty. 4) 020-000517-1: CAP SCREW M3*3 SUS304 (Qty. 7) 032-000005-1: FLAT WASHER M3 SUS304 POLISHED ROUND (Qty. 1) 020-000821-1: CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER (Qty. 1) Assembly Part No: 5085-408542-11 COVER(ICP-R)SET 5010-101203-11: COVER 1 026-006336-1: SPACER FWSSS-D5-V3-T1.3 (Qty. 2) 020-000518-1: CAP SCREW M3*4 SUS304 (Qty. 2) 020-000821-1: CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER (Qty. 2) Assembly Part No: 5085-403839-12 GUIDE(10) SET 5004-400001-11: GUIDE (509510012311 (Qty. 9) 020-000177-1: FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 (Qty. 9) Assembly Part No: 5087-400151-11 PLATE(COL) SET 5013-000002-11: COOLING PLATE RCP-3002 (Qty. 1) Assembly Part No: 5086-405382-11 ICPL ELEC ASSY #01 5086-405376-11: SENSOR,CYLINDER IFCOL #03 (Qty. 1) 5086-405377-11: SENSOR,PHOTO IFCOL AGROUND #03 (Qty. 1) 5086-405378-11: CABLE,IFCOL SIG #03 (Qty. 1) 5086-405379-11: SENSOR,WATER LEAK IFCOL #03 (Qty. 1) 5086-405380-11: CABLE,GND IFCOL #07 (Qty. 1) 5086-405381-11: CABLE,GND IFCOL #08 (Qty. 1) This TEL Tokyo Electron ICPL Interface Block Chill Plate is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 24"x24"x24" @ 60 lbs. Shipping Terms: All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Lister 31