TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Complete

TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Complete Inventory # A-17664 Part No: 5087-400487-15 Model No: VALVE ASSY (2NDAMF) DEV.SOLUTION2 Develop Process Station, DEV ASSY Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Assembly Part No: 5087-400486-15, VALVE ASSY(AMF) 5004-400006-11 NUT(15A) (509510027011 1 5004-100010-11 JOINT (509510063511 1 5010-201961-12 BASE(AMF) 1 5010-402583-11 COVER 1 5010-403084-11 PLATE 1 027-002206-1 O-RING BUTYL P-14 BLACK 2 027-100566-1 O-RING BUTYL P-9 BLACK 1 5012-000089-11 AIR-OPERATED VALVE AMF-V-X1 1 024-014711-1 SPEED CONTROLLER AS1301FM-M5-04 1 028-006338-1 FITTING,TUBE EC4-M5A-TR 1 028-001390-1 FITTING,TUBE EYB6-6-TR 1 028-005336-1 FITTING,TUBE UR6-4M 1 017-002107-1 TUBE PN-4-4*2.5 YELLOW 4 020-000049-1 CAP SCREW M4*40 SUS304 2 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 2 032-000058-1 SPRING WASHER M4 SUS304 2 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 6 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 4 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2 5041-000159-11 CABLE ASSY AMFV #01 1 This TEL Tokyo Electron 5087-400486-15 Dev.Solution 2 Valve is used working surplus. Includes interface cable. The physical condition is good, but there are signs of previous use and handling. Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 14"x14"x14" @ 9 lbs. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Items are sold with a 90-Day Satisfaction Guarantee Lister 7