TEL Tokyo Electron COT Coat Process Assembly 5087-404467-12 Lithius Working

TEL Tokyo Electron COT Coat Process Assembly 5087-404467-12 Lithius Working Part No: COT Coat Process Assembly COT Coat Process Station Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System Parts List (approximations, some parts may vary) Assembly Part No: 5087-404467-12 SCOPE ASSY 5004-300016-11 BATH,RRC (509510024911 5010-311958-11 COVER,BATH 5010-409215-11 PLATE (Qty. 2) 5010-311833-11 BLOCK (Qty. 2) 5010-409130-11 SUPPORT (Qty. 2) 5010-310850-11 COVER 5010-310851-11 SUPPORT 036-007976-1 SENSOR FIVER FU-2638 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER (Qty. 6) 020-000518-1 CAP SCREW M3*4 SUS304 (Qty. 4) 020-000007-1 CAP SCREW M3*8 SUS304 (Qty. 4) 020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 2) 020-000009-1 CAP SCREW M3*10 SUS304 (Qty. 2) 020-000824-1 CAP SCREW M3*10 SUS304 W/SPR & FLAT WASHER (Qty. 4) 5086-405454-11 SENSOR,FIBER OPTICAL COT #06 Assembly Part No: 5085-414381-11 BATH(SLT) ASSY 010-303174-12 BATH,UPPER 5010-304645-11 BATH,UNDER 5010-303181-11 BASE 027-004755-1 O-RING KALREZ6375UP S-95 BLACK 027-004754-1 O-RING KALREZ6375UP S-100 BLACK 027-005168-1 O-RING KALREZ6375UP AS568A-116 BLACK 028-016258-1 FITTING,TUBE SS-810-1-OR 5010-406110-11 PACKING(M3) (Qty. 2) 028-008384-1 FITTING,TUBE 3.2DIA/2.2DIA*M5(IN-233-468-1 (Qty. 2) 028-008385-1 FITTING,TUBE 3.2DIA/2.2DIA*M5(IN-233-467-1 (Qty. 3) 028-001201-1 FITTING,TUBE TF-SUS 020-000012-1 CAP SCREW M3*12 SUS304 (Qty. 9) 020-100959-1 SET SCREW PT1/2 SUS TAPER PLUG 1-TYPE (Qty. 2) 020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 8) 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER (Qty. 4) 5017-000009-11 TUBE,TEFLON T/#9003-PFA-NE 3.17*2.17 5017-000016-11 TUBE,TEFLON T/#9003-PFA-NE 12.7*9.52 Assembly Part No: 5087-403836-12 NOZZLE(1-5) ASSY 2910-426487-11 GASKET 5004-300018-11 TIP,NOZZLE (509510025912 5003-400002-11 STOPPER,CUT 5004-400027-11 NUT,BLOCK (509510042511 (Qty. 2) 5004-400053-11 PLATE (509510101211 5004-200006-11 CASE,LOW (509510063011 5004-200005-11 CASE,UPR (509510062911 5004-400013-11 COVER,MAGNET (509510036311 5003-300026-11 BLOCK(2),JUNCTION 5010-405489-11 TUBE SLEEVE 5010-405493-11 PACKING 5004-300019-11 JOINT (509510033211 5004-300017-11 BODY (509510033311 017-000214-1 TUBE,TEFLON NO.900-PTFE 4*3*0.5 (Qty. 3) 5017-000020-11 TUBE,POLYURETHANE U2-4-7.5*6 TRANSPARENT 20000L 017006386-1 HOSE SNACLE HOSE 9*13 L1=1700 L2=40 5037-000001-11 MAGNET ELECTROMAGNET 047-003506-1 DUCT,WIRING,FLEX TKP0250-15BR37-3L 047-003175-1 #BRACKET TKP0250-15B PKA 036-007024-1 #MAGNET TZ-0079 5024-000074-11 FLTG JOINT TC4N4-TY02 027-101580-1 O-RING NYTRYL S-18 BLACK 027-101503-1 O-RING NYTRYL S-10 BLACK (Qty. 2) 020-000579-1 CAP SCREW M3*25 SUS304 FULL SCREW (Qty. 4) 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 (Qty. 4) 020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 6) 020-000417-1 CAP SCREW M2*10 SUS304 (Qty. 2) 020-000194-1 FLAT COUNTERSUNK HEAD SCREW M4*8 SUS304 (Qty. 2) 020-000414-1 CAP SCREW M2*4 SUS304 (Qty. 2) 020-001178-1 CAP SCREW M3*30 SUS304 (Qty. 4) 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 (Qty. 2) 032-000054-1 SPRING WASHER M3 SUS304 (Qty. 4) 020-000020-1 CAP SCREW M3*20 SUS304 (Qty. 4) 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE (Qty. 4) 5086-404224-11 ELECTROMAGNET,COT #22 Assembly Part No: 5087-403837-12 NOZZLE(6-10) ASSY 2910-426487-11 GASKET 5004-300018-11 TIP,NOZZLE (509510025912 5003-400002-11 STOPPER,CUT 5004-400027-11 NUT,BLOCK (509510042511 (Qty. 2) 5004-400053-11 PLATE (509510101211 5004-200006-11 CASE,LOW (509510063011 5004-200005-11 CASE,UPR (509510062911 5004-400013-11 COVER,MAGNET (509510036311 5003-300026-11 BLOCK(2),JUNCTION 5010-405489-11 TUBE SLEEVE 5010-405493-11 PACKING 5004-300019-11 JOINT (509510033211 5004-300017-11 BODY (509510033311 017-000214-1 TUBE,TEFLON NO.9003-PTFE 4*3*0.5 (Qty. 3) 5017-000020-11 TUBE,POLYURETHANE U2-4-7.5*6 TRANSPARENT 20000L 017-006385-1 HOSE SNACLE HOSE 9*13 L1=1600 L2=40 5037-000001-11 MAGNET ELECTROMAGNET 047-003506-1 DUCT,WIRING,FLEX TKP0250-15BR37-3L 047-003175-1 #BRACKET TKP0250-15B PKA 036-007024-1 #MAGNET TZ-0079 5024-000074-11 FLTG JOINT TC4N4-TY02 027-101580-1 O-RING NYTRYL S-18 BLACK 027-101503-1 O-RING NYTRYL S-10 BLACK (Qty. 2) 020-000579-1 CAP SCREW M3*25 SUS304 FULL SCREW (Qty. 4) 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 (Qty. 4) 020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 6) 020-000417-1 CAP SCREW M2*10 SUS304 (Qty. 2) 020-000194-1 FLAT COUNTERSUNK HEAD SCREW M4*8 SUS304 (Qty. 2) 020-000414-1 CAP SCREW M2*4 SUS304 (Qty. 2) 020-001178-1 CAP SCREW M3*30 SUS304 (Qty. 4) 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 (Qty. 2) 032-000054-1 SPRING WASHER M3 SUS304 (Qty. 4) 020-000020-1 CAP SCREW M3*20 SUS304 (Qty. 4) 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE (Qty. 4) 5086-404229-11 ELECTROMAGNET,COT #27 Assembly Part No: 5085-405248-14 BLOCK ASSY,NOZZLE 5010-403579-11 BLOCK 5004-300076-11 BRACKET,BLOCK (509510071411 036-007024-1 #MAGNET TZ-0079 020-000417-1 CAP SCREW M2*10 SUS304 (Qty. 2) 020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 3) 020-000414-1 CAP SCREW M2*4 SUS304 (Qty. 2) Assembly Part No: 5085-405334-12 JOINT ASSY(A),NOZZLE 5024-000031-11 #JOINT MA210-AM3-X276A 020-001234-1 CAP SCREW M2.6*8 SUS304 (Qty. 2) 020-002675-1 CAP SCREW M2.6*14 SUS304 Assembly Part No: 5085-405335-12 JOINT ASSY(B),NOZZLE 5024-000032-11 #JOINT MA210-AM3-X276B 020-001234-1 CAP SCREW M2.6*8 SUS304 (Qty. 2) 020-002675-1 CAP SCREW M2.6*14 SUS304 Assembly Part No: 5085-405336-12 JOINT ASSY(C),NOZZLE 5024-000033-11 #JOINT MA210-AM3-X276C 020-001234-1 CAP SCREW M2.6*8 SUS304 (Qty. 2) 020-002675-1 CAP SCREW M2.6*14 SUS304 Assembly Part No: 5087-401414-15 JUNCTION(S) ASSY 5010-305449-11 BLOCK,JUNCTION (Qty. 2) 5004-300033-11 BLOCK(1) (509510028911 5004-200004-11 BLOCK(2) (509510030611 5004-400043-11 PLATE(1),JUNCTION (509510060611 (Qty. 2) 044-002036-1 SUPPORT,PCB BSB-351 (Qty. 4) 028-008314-1 FITTING,TUBE C1N3/8-PT1/4ST (Qty. 2) 5028-000002-11 FITTING,TUBE TC4N6*4-PT1/4-ST 036-003553-1 RESISTANCE TEMPERATURE SENSOR Y-26959 (299880007211 027-101688-1 O-RING NYTRYL S-12 BLACK (Qty. 6) 017-005835-1 TUBE PN-1-3/8 BLUE (299510186511 020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 4) 020-000579-1 CAP SCREW M3*25 SUS304 FULL SCREW (Qty. 8) 020-000598-1 CAP SCREW M3*45 SUS304 (Qty. 4) 020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 (Qty. 4) 020-001719-1 SET SCREW PT1/4 SUS TAPER PLUG 1-TYPE 1910-425012-11 PACKING(M3-PTFE) (Qty. 4) 5086-404718-11 RESISTIVE TEMP DETECTOR,#009 Assembly Part No: 5085-405425-11 PLATE ASSY,JUNCTION 5010-401427-11 PLATE(3),JUNCTION 027-101503-1 O-RING NYTRYL S-10 BLACK (Qty. 2) 020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 4) This is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 24"x24"x24" @ 35 lbs. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Lister 7