TEL Tokyo Electron Left Right Scan Arm DEV Develop Process Station Lithius Spare

TEL Tokyo Electron Left Right Scan Arm DEV Develop Process Station Lithius Spare Model No: Left Right DEV Scan Arm Assembly DEV Develop Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Parts List (approximation, parts may vary) Assembly Part No: 5087-400475-16, ARM(L) ASSY 5010-302038-11 BASE,SCAN 1 5010-304964-11 BASE 1 2910-414906-12 BLOCK,BELT 1 5010-400223-11 CLAMP,BELT 1 5010-401999-11 SENSOR SHUTTER 1 5010-304965-11 BASE,MOTOR 1 5010-308444-11 BRACKET 1 5010-303173-11 COVER(3) 1 5010-202195-11 COVER(LEFT) 1 5010-202206-11 COVER(RIGHT) 1 5010-308445-11 COVER(1) 1 5010-308446-11 ARM(LEFT) 1 5010-308447-11 ARM(RIGHT) 1 5010-402945-12 BRACKET,TUBE 1 5010-402934-11 STOPPER(LEFT) 1 5010-402933-11 STOPPER(RIGHT) 1 5010-402935-11 BLOCK,STOPPER 2 5010-404291-11 PLATE,AIRCHUCK 1 5010-405556-11 PLATE 1 047-003295-1 FLEXIBLE DUCT TKP0180-15R37-20L 1 026-005090-1 POSITIONING PIN SJPDA4-6 2 047-003566-1 #BRACKET TKP0180-15 PA 2 5024-000059-11 ACTUATOR LX-525A-5BD-30S 1 024-019979-1 AIR CYLINDER MHZ2-10C3M 1 028-003338-1 FITTING,TUBE M-5HL-4 1 028-006348-1 FITTING,TUBE EYB4-4-TR 1 017-002107-1 TUBE PN-4-4*2.5 YELLOW 1 020-000032-1 CAP SCREW M4*10 SUS304 8 020-000064-1 CAP SCREW M5*20 SUS304 4 020-001089-1 CAP SCREW M3*14 SUS304 5 020-000518-1 CAP SCREW M3*4 SUS304 10 020-000080-1 CAP SCREW M6*10 SUS304 4 020-000090-1 CAP SCREW M6*20 SUS304 4 020-001167-1 CAP SCREW M5*10 SUS304 2 020-000506-1 CAP SCREW M2.6*6 SUS304 4 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 2 020-000005-1 CAP SCREW M3*6 SUS304 4 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR FLAT WASHER 16 5086-403317-11 ARM(L) ASSY 1 Assembly Part No: 5087-400476-16, ARM(R) ASSY 5010-302038-11 BASE,SCAN 1 5010-304964-11 BASE 1 2910-414906-12 BLOCK,BELT 1 5010-400223-11 CLAMP,BELT 1 5010-401999-11 SENSOR SHUTTER 1 5010-304965-11 BASE,MOTOR 1 5010-308444-11 BRACKET 1 5010-303173-11 COVER(3) 1 5010-202195-11 COVER(LEFT) 1 5010-202206-11 COVER(RIGHT) 1 5010-308445-11 COVER(1) 1 5010-308446-11 ARM(LEFT) 1 5010-308447-11 ARM(RIGHT) 1 5010-402945-12 BRACKET,TUBE 1 5010-402934-11 STOPPER(LEFT) 1 5010-402933-11 STOPPER(RIGHT) 1 5010-402935-11 BLOCK,STOPPER 2 5010-404291-11 PLATE,AIRCHUCK 1 5010-405556-11 PLATE 1 047-003295-1 FLEXIBLE DUCT TKP0180-15R37-20L 1 026-005090-1 POSITIONING PIN SJPDA4-6 2 047-003566-1 #BRACKET TKP0180-15 PA 2 5024-000059-11 ACTUATOR LX-525A-5BD-30S 1 024-019979-1 AIR CYLINDER MHZ2-10C3M 1 028-003338-1 FITTING,TUBE M-5HL-4 1 017-002107-1 TUBE PN-4-4*2.5 YELLOW 1 020-000032-1 CAP SCREW M4*10 SUS304 8 020-000064-1 CAP SCREW M5*20 SUS304 4 020-001089-1 CAP SCREW M3*14 SUS304 5 020-000518-1 CAP SCREW M3*4 SUS304 10 020-000080-1 CAP SCREW M6*10 SUS304 4 020-000090-1 CAP SCREW M6*20 SUS304 4 020-001167-1 CAP SCREW M5*10 SUS304 2 020-000506-1 CAP SCREW M2.6*6 SUS304 4 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 2 020-000005-1 CAP SCREW M3*6 SUS304 4 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 16 5086-403314-11 ARM(R) ASSY 1 Assembly Part No: 5085-413053-11, NOZZLE TOP(NLD) ASSY 5010-101598-11 COVER(NLD-12),TOP 1 5010-402959-11 PIN 2 5004-100008-11 BLOCK,TOP (509510060811 1 5004-100009-11 HOLDER,TOP (509510060911 2 5004-400006-11 NUT(15A) (509510027011 2 2910-408085-11 NUT(3/8) 2 2910-419581-11 JOINT(3/8) 2 5010-402313-11 TUBE(3/8) 2 5010-407286-11 TUBE,FRANGE 2 5010-203560-11 BRACKET(R),NOZZLE 1 5010-203561-11 BRACKET(L),NOZZLE 1 027-002861-1 O-RING BUTYL AS568-170 BLACK 2 027-005360-1 O-RING KALREZ 6375UP S-10 BLACK 4 027-101580-1 O-RING NYTRYL S-18 BLACK 2 5017-000002-11 TUBE,TEFLON NO.9003-PL I*15A*1000*A 1 5017-000003-11 TUBE,TEFLON NO.9003-PL I*15A*1700*A 1 027-100998-1 O-RING NYTRYL S-16 BLACK 1 027-005358-1 O-RING KALREZ6375UP S-6 BLACK 2 020-000009-1 CAP SCREW M3*10 SUS304 25 020-000525-1 CAP SCREW M3*25 SUS304 4 020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 4 020-000028-1 CAP SCREW M4*6 SUS304 8 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 8 020-001116-1 CAP SCREW M5*8 SUS304 4 020-001116-1 CAP SCREW M5*8 SUS304 4 Assembly Part No: 2985-494405-11, NOZZLE(NLD-12) ASSY 2985-492222-11 NOZZLE(NLD-12) ASSY (ASSY) 1 2985-494403-11 FIXED(NLD-12) 2 Assembly Part No: 5085-413053-11, NOZZLE TOP(NLD) ASSY 5010-101598-11 COVER(NLD-12),TOP 1 5010-402959-11 PIN 2 5004-100008-11 BLOCK,TOP (509510060811 1 5004-100009-11 HOLDER,TOP (509510060911 2 5004-400006-11 NUT(15A) (509510027011 2 2910-408085-11 NUT(3/8) 2 2910-419581-11 JOINT(3/8) 2 5010-402313-11 TUBE(3/8) 2 5010-407286-11 TUBE,FRANGE 2 5010-203560-11 BRACKET(R),NOZZLE 1 5010-203561-11 BRACKET(L),NOZZLE 1 027-002861-1 O-RING BUTYL AS568-170 BLACK 2 027-005360-1 O-RING KALREZ 6375UP S-10 BLACK 4 027-101580-1 O-RING NYTRYL S-18 BLACK 2 5017-000002-11 TUBE,TEFLON NO.9003-PL I*15A*1000*A 1 5017-000003-11 TUBE,TEFLON NO.9003-PL I*15A*1700*A 1 027-100998-1 O-RING NYTRYL S-16 BLACK 1 027-005358-1 O-RING KALREZ6375UP S-6 BLACK 2 020-000009-1 CAP SCREW M3*10 SUS304 25 020-000525-1 CAP SCREW M3*25 SUS304 4 020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 4 020-000028-1 CAP SCREW M4*6 SUS304 8 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 8 020-001116-1 CAP SCREW M5*8 SUS304 4 Assembly Part No: 5085-413053-11, NOZZLE TOP(NLD) ASSY 5010-101598-11 COVER(NLD-12),TOP 1 5010-402959-11 PIN 2 5004-100008-11 BLOCK,TOP (509510060811 1 5004-100009-11 HOLDER,TOP (509510060911 2 5004-400006-11 NUT(15A) (509510027011 2 2910-408085-11 NUT(3/8) 2 2910-419581-11 JOINT(3/8) 2 5010-402313-11 TUBE(3/8) 2 5010-407286-11 TUBE,FRANGE 2 5010-203560-11 BRACKET(R),NOZZLE 1 5010-203561-11 BRACKET(L),NOZZLE 1 027-002861-1 O-RING BUTYL AS568-170 BLACK 2 027-005360-1 O-RING KALREZ 6375UP S-10 BLACK 4 027-101580-1 O-RING NYTRYL S-18 BLACK 2 5017-000002-11 TUBE,TEFLON NO.9003-PL I*15A*1000*A 1 5017-000003-11 TUBE,TEFLON NO.9003-PL I*15A*1700*A 1 027-100998-1 O-RING NYTRYL S-16 BLACK 1 027-005358-1 O-RING KALREZ6375UP S-6 BLACK 2 020-000009-1 CAP SCREW M3*10 SUS304 25 020-000525-1 CAP SCREW M3*25 SUS304 4 020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 4 020-000028-1 CAP SCREW M4*6 SUS304 8 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 8 020-001116-1 CAP SCREW M5*8 SUS304 4 Assembly Part No: 2985-494405-11, NOZZLE(NLD-12) ASSY 2985-492222-11 NOZZLE(NLD-12) ASSY (ASSY) 1 2985-494403-11 FIXED(NLD-12) 2 Assembly Part No: 5085-413053-11, NOZZLE TOP(NLD) ASSY 5010-101598-11 COVER(NLD-12),TOP 1 5010-402959-11 PIN 2 5004-100008-11 BLOCK,TOP (509510060811 1 5004-100009-11 HOLDER,TOP (509510060911 2 5004-400006-11 NUT(15A) (509510027011 2 2910-408085-11 NUT(3/8) 2 2910-419581-11 JOINT(3/8) 2 5010-402313-11 TUBE(3/8) 2 5010-407286-11 TUBE,FRANGE 2 5010-203560-11 BRACKET(R),NOZZLE 1 010-203561-11 BRACKET(L),NOZZLE 1 027-002861-1 O-RING BUTYL AS568-170 BLACK 2 027-005360-1 O-RING KALREZ 6375UP S-10 BLACK 4 027-101580-1 O-RING NYTRYL S-18 BLACK 2 5017-000002-11 TUBE,TEFLON NO.9003-PL I*15A*1000*A 1 5017-000003-11 TUBE,TEFLON NO.9003-PL I*15A*1700*A 1 027-100998-1 O-RING NYTRYL S-16 BLACK 1 027-005358-1 O-RING KALREZ6375UP S-6 BLACK 2 020-000009-1 CAP SCREW M3*10 SUS304 25 020-000525-1 CAP SCREW M3*25 SUS304 4 020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 4 020-000028-1 CAP SCREW M4*6 SUS304 8 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 8 020-001116-1 CAP SCREW M5*8 SUS304 4 Assembly Part No: 5085-404315-17 LD BATH ASSY 5010-100360-11 BATH 1 5010-308949-11 HOLDER,BATH 1 5010-402769-11 DRAIN,BATH 1 1910-421459-12 LOCK NUT 4 5010-308950-11 BRACKET,BATH 1 5010-203068-11 BAR(12),CENTER 1 5010-406320-11 BRACKET(FILLTER) 1 5010-403965-11 BRACKET(NEEDLE) 1 025-000007-1 SPRING 1070 4 027-102597-1 O-RING BUTYL S-6 BLACK 2 028-008384-1 FITTING,TUBE 3.2DIA/2.2DIA*M5(IN-233-468-1 1 027-002346-1 O-RING BUTYL AS568-268 BLACK 1 028-018165-1 FITTING,RESIN IAS-513180 2 024-006916-1 FILTER WGFG 01K 1 028-002328-1 FITTING,TUBE F900-3.2N 2 012-002468-1 NEEDLE VALVE GYX-0006 (199880112611 1 028-008385-1 FITTING,TUBE 3.2DIA/2.2DIA*M5(IN-233-467-1 1 5028-000101-11 FITTING,TUBE IN-233-1370 1 5017-000015-11 TUBE PNH-4-6.35*4.35 3 017-002653-1 TUBE PFA-HGL 6.35*4.35-200*2000 2 017-003878-1 TUBE,TEFLON NO.9003-PFA-HG 3.17*2.17*0.5 1 028-002329-1 FITTING,TUBE F900-3.2SR 2 020-000602-1 CAP SCREW M3*50 SUS304 4 020-001093-1 CAP SCREW M4*14 SUS304 2 020-000007-1 CAP SCREW M3*8 SUS304 4 032-000058-1 SPRING WASHER M4 SUS304 2 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 2 020-000518-1 CAP SCREW M3*4 SUS304 2 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 6 Assembly Part No: 5085-402156-16, LD BATH ASSY (2NDLINE) 5010-100360-11 BATH 1 5010-308949-11 HOLDER,BATH 1 5010-402769-11 DRAIN,BATH 1 1910-421459-12 LOCK NUT 4 5010-308950-11 BRACKET,BATH 1 5010-203068-11 BAR(12),CENTER 1 025-000007-1 SPRING 1070 4 027-102597-1 O-RING BUTYL S-6 BLACK 2 028-008384-1 FITTING,TUBE 3.2DIA/2.2DIA*M5(IN-233-468-1 1 027-002346-1 O-RING BUTYL AS568-268 BLACK 1 028-018165-1 FITTING,RESIN IAS-513180 2 024-006916-1 FILTER WGFG 01K 1 028-002328-1 FITTING,TUBE F900-3.2N 2 012-002468-1 NEEDLE VALVE GYX-0006 (199880112611 1 028-008385-1 FITTING,TUBE 3.2DIA/2.2DIA*M5(IN-233-467-1 1 028-007164-1 FITTING,RESIN EYB 1/4-C1 1 5028-000101-11 FITTING,TUBE IN-233-1370 1 5017-000015-11 TUBE PNH-4-6.35*4.35 1 017-002653-1 TUBE PFA-HGL 6.35*4.35-200*2000 2 017-003878-1 TUBE,TEFLON NO.9003-PFA-HG 3.17*2.17*0.5 1 028-002329-1 FITTING,TUBE F900-3.2SR 2 020-000602-1 CAP SCREW M3*50 SUS304 4 020-001093-1 CAP SCREW M4*14 SUS304 2 020-000007-1 CAP SCREW M3*8 SUS304 4 032-000058-1 SPRING WASHER M4 SUS304 2 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 2 020-000518-1 CAP SCREW M3*4 SUS304 2 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 2 Assembly Part No: 5085-412389-11, BASE(SCAN) ASSY 5010-203421-11 BASE(SCAN) 1 5010-405439-11 COVER 1 5010-404421-11 BLOCK,ADJUST 2 5018-000005-11 LM GUIDE SHS15V1FEM+620LF-2 2 020-000032-1 CAP SCREW M4*10 SUS304 8 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS30 4 020-001093-1 CAP SCREW M4*14 SUS304 22 033-000143-1 NUT M4 SUS304 3-TYPE 2 020-000028-1 CAP SCREW M4*6 SUS304 2 032-000058-1 SPRING WASHER M4 SUS304 2 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 2 047-000534-1 CABLE MOUNT TA1S8-M 2 020-000005-1 CAP SCREW M3*6 SUS304 4 Assembly Part No: 5087-402854-11, MOTOR(L) ASSY 5010-405555-11 BRACKET 1 5010-403044-11 SHAFT 1 2902-400093-11 PULLEY(S) 1 2902-400140-11 PULLEY(N) 1 2902-400139-11 PULLEY(M) 1 022-100726-1 BEARING F688ZZ 2 023-003035-1 BELT,TIMING B60S3M1299G 1 023-003036-1 BELT,TIMING B100S3M162G 1 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2 020-001126-1 SET SCREW M4*5 SUS304 6 021-100309-1 E-RING ETW-6 SUS304 2 020-000005-1 CAP SCREW M3*6 SUS304 4 5086-403310-11 MOTOR(L) ASSY 1 Assembly Part No: 5085-404442-12, PULLEY ASSY 5010-405325-11 BLOCK,ADJUST 1 5010-400218-11 SHAFT 1 2902-400093-11 PULLEY(S) 1 5010-404123-11 BLOCK,TENSION 1 022-100726-1 BEARING F688ZZ 2 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 1 020-000009-1 CAP SCREW M3*10 SUS304 2 020-001093-1 CAP SCREW M4*14 SUS304 1 033-000143-1 NUT M4 SUS304 3-TYPE 1 021-100309-1 E-RING ETW-6 SUS304 2 020-001126-1 SET SCREW M4*5 SUS304 2 This TEL Tokyo Electron Left Right Scan Arm is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 36"x24"x14" @ 60 lbs. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Lister 0