TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Working

TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Working Part No: 5087-400487-15 Model No: VALVE ASSY (2NDAMF) DEV.SOLUTION2 Develop Process Station, DEV ASSY Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List CKD Valve Part No: AMF-V-X1 Assembly Part No: 5087-400487-15 VALVE ASSY(2NDAMF) 5010-201961-12 BASE(AMF) 1 5010-402583-11 COVER 1 5010-403084-11 PLATE 1 5004-100010-11 JOINT (509510063511 1 027-002206-1 O-RING BUTYL P-14 BLACK 2 027-100566-1 O-RING BUTYL P-9 BLACK 1 5012-000089-11 AIR-OPERATED VALVE AMF-V-X1 1 024-014711-1 SPEED CONTROLLER AS1301FM-M5-04 1 028-006338-1 FITTING,TUBE EC4-M5A-TR 1 020-000049-1 CAP SCREW M4*40 SUS304 2 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 2 032-000058-1 SPRING WASHER M4 SUS304 2 This is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 16"x16"x16" @ 10 lbs. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Lister 31